Design and input-shaping control of a novel scanner for high-speed atomic force microscopy
نویسندگان
چکیده
A novel design of a scanning unit for atomic force microscopy (AFM) is presented that enables scanning speeds three orders of magnitude faster than compared to conventional AFMs. The new scanner is designed for high mechanical resonance frequencies, based on a new scanner design, which is optimized using finite element analysis. For high-speed scanning a new controller, based on input-shaping techniques, has been developed that reduces imaging artifacts due to the scanner’s dynamics. The implementation of the new AFM system offers imaging capabilities of several thousand lines per second with a scanning range of 13 lm in both scanning directions, and the freedom to choose the fast scan-axis in any arbitrary direction in the X–Y-plane. 2008 Elsevier Ltd. All rights reserved.
منابع مشابه
High-speed Serial-kinematic Spm Scanner: Design and Drive Considerations
This paper describes the design of a flexure-guided, two-axis nanopositioner (scanner) driven by piezoelectric stack actuators. The scanner is specifically designed for high-speed scanning probe microscopy (SPM) applications, such as atomic force microscopy (AFM). A high-speed AFM scanner is an essential component for acquiring high-resolution, three-dimensional, time-lapse images of fast proce...
متن کاملDesign of Fractional Order Sliding Mode Controller for Chaos Suppression of Atomic Force Microscope System
A novel nonlinear fractional order sliding mode controller is proposed to control the chaotic atomic force microscope system in presence of uncertainties and disturbances. In the design of the suggested fractional order controller, conformable fractional order derivative is applied. The stability of the scheme is proved by means of the Lyapunov theory based on conformable fractional order deriv...
متن کاملDesign of a compact serial-kinematic scanner for high-speed atomic force microscopy: an analytical approach
A systematic procedure for designing a high-speed, compact serial-kinematic XYZ scanner for atomic force microscopy is presented in this Letter. Analytical stiffness calculations are used to estimate the first natural frequency and travel range of the scanner. Design and characterisation of the scanner are presented. Results of finite-element analysis and experimentation on the scanner revealed...
متن کاملNote: High-speed Z tip scanner with screw cantilever holding mechanism for atomic-resolution atomic force microscopy in liquid.
High-speed atomic force microscopy has attracted much attention due to its unique capability of visualizing nanoscale dynamic processes at a solid/liquid interface. However, its usability and resolution have yet to be improved. As one of the solutions for this issue, here we present a design of a high-speed Z-tip scanner with screw holding mechanism. We perform detailed comparison between desig...
متن کاملHigh-speed atomic force microscopy for large scan sizes using small cantilevers.
We present a high-speed atomic force microscope that exhibits a number of practical advantages over previous designs. Its central component is a high-speed scanner with a maximum scan size of 23 microm x 23 microm and a conveniently large sample stage area (6.5 mm x 6.5 mm). In combination with small cantilevers, image rates of up to 46 images s(-1) in air and 13 images s(-1) in liquid are reac...
متن کامل